Publication Type:
Journal Article
Authors:
Gloter, Alexandre; Badjeck, Vincent; Bocher, Laura; Brun, Nathalie; March, Katia; Marinova, Maya; Tencé, Marcel; Walls, Michael; Zobelli, Alberto; Stéphan, Odile; Colliex, Christian
Source:
Materials Science in Semiconductor Processing, Volume 65, p.2 - 17 (2017)
DOI:
10.1016/j.mssp.2016.07.006
