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Enhanced sputter and secondary ion yields using MeV gold nanoparticle beams delivered by the Andromede facility

Publication Type:

Journal Article

Authors:

Lai, Thanh Loan; Jacquet, Dominique; Ribaud, Isabelle; Eller, Michael John; Verkhoturov, Dmitriy; Schweikert, Emile Albert; Tizei, Luiz H.G.; Shao, Fuhui; Bilgen, Suheyla; Mercier, Bruno; Sattonnay, Gael; Della Negra, Serge

Source:

Journal of Vacuum Science & Technology B, Volume 38, Issue 4, p.044008 (2020)

DOI:

10.1116/6.0000173