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Investigation of the thermal stability of Mg/Co periodic multilayers for EUV applications

Publication Type:

Journal Article

Authors:

Hu, M.-H.; Guen, K.; André, J.-M.; Zhou, S. K.; Li, H. C.; Zhu, J. T.; Wang, Z. S.; Meny, C.; Mahne, N.; Giglia, A.; Nannarone, S.; Estève, I.; Walls, Michael; Jonnard, P.

Source:

Applied Physics A, Volume 106, Issue 3, p.737 - 745 (2012)

DOI:

10.1007/s00339-011-6681-9